Description

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Introduction.- Piezoelectric Transducers.- Types of Nanopositioners.- Mechanical Design: Flexure-based Nanopositioners.- Position Sensors.- Shunt Control.- Feedback Control.- Force Feedback Control.- Feedforward Control.- Command Shaping.- Hysteresis Modeling and Control.- Charge Drives.- Noise in Nanopositioning Systems.- Electrical Considerations.

About the Author

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The authors have twenty years combined experience in the design, fabrication and control of precision mechatronic systems. Dr. Fleming is a Senior Lecturer and Australian Research Fellow at the School of Electrical Engineering and Computer Science, The University of Newcastle, Australia. His research includes nanopositioning, sensors, atomic force microscopy and nanofabrication. Dr. Leang, is an Associate Professor of Mechanical Engineering at the University of Nevada-Reno, Nevada. His research includes the modeling and control of piezo actuators for scanning probe microscopy, fabrication and control of electroactive polymers, and the design of microelectromechanical systems (MEMS) for nanotechnology.